Publications

Molecular network reinforcement of sol-gel glasses.
Adv. Mater. 2007, 19, 3989-3994.
G. Dubois, W. Volksen, T. Magbitang, R.D. Miller, D.M. Gage, R.H. Dauskardt.

Organocatalytic living ring-opening polymerization of cyclic carbosiloxanes.
Org. Lett., 2006, 8, 4683.
B.G.G. Lohmeijer, G. Dubois, F. Leibfarth, R.C. Pratt, F. Nederberg, A. Nelson, R.M. Waymouth, C. Wade, J.L. Hedrick.

Monolayered organosilicate toroids and related structures: A phase diagram for templating from block copolymers.
Nano Lett. 2006, 6, 1761.
J. Choi, T. M. Hermans, B.G.G. Lohmeijer, R.C. Pratt, G. Dubois, J. Frommer, R.M. Waymouth, J.L. Hedrick.

Application of solvent-directed assembly of block copolymers to the synthesis of nanostructured materials with low dielectric constants.
Angew. Chem. Int. Ed. 2006, 45, 6548.
T. M. Hermans, J. Choi, B.G.G. Lohmeijer, G. Dubois, R.C. Pratt, H-C. Kim, R.M. Waymouth, J.L. Hedrick.

Imaging thin films of nanoporous low-k dielectrics: Comparison between ultramicrotomy and focused ion beam preparations for transmission electron microscopy.
Microscopy and Microanalysis 2006, 12(2), 156.
L.E. Thompson, P.M. Rice, E. Delenia, V.Y. Lee, P.J. Brock, T.P. Magbitang, G. Dubois, W. Volksen, R.D. Miller, H.C. Kim.

Oriented Nanoporous Lamellar Organosilicates templated from Topologically Unsymmetrical Dendritic-Linear Block Copolymers
Angew. Chem. Intern. Ed. 2005, 44, 7574-7580.
H.C. Kim, T. Magbitang, V. Lee, J.N. Cha, H.L. Wang, W.R. Chung, R.D. Miller, G. Dubois, W. Volksen, J.L. Hedrick.

Phase Transition Behavior of Poly(melthyl methacrylate-co-dimethylaminoethyl methacrylate)/methyl silsesquioxane Hybrid Nanocomposites studied by Dansyl Fluorescence
Chemistry of Materials 2005, 17(6), 1521-1528.
Q.R. Huang, C.W. Frank, D. Mecerreyes, W. Volksen, R.D. Miller.

Detection of Open or Closed Porosity in Low-kappa Dielectrics by Solvent Diffusion
Microelectronic Engineering 2005, 82(2), 113-18.
M. A. Worsley, Michael E. Roberts, S. F. Bent, Stephen M. Gates, Thomas M. Shaw, Willi Volksen, Robert J. Miller.

First example of a nanoporous high-temperature polymer thermoset: Eluding transition-time-temperature constrainsts associated with organic thermosets.
Adv. Mater. 2004, 16, 1525-1529.
E.F.Connor, V. Lee, T. Magbitang, C.J. Hawker, W. Volksen, R. Siemens, R.A. DiPietro, J.L. Hedrick, H.C. Kim, R.D. Miller, J.L. Hedrick.

Porous Organosilicates Low-Dielectric Films for High-Frequency Devices.
Journal of Electronic Materials 2004, 33(2), 135-40A.
Knoesen, G. Song, W. Volksen, E. Huang, T. Magbitang, L.K. Sundberg, J. L. Hedrick, C. J. Hawker, R. D. Miller.

A Buckling-Based Metrology for Measuring the Elastic Moduli of Polymeric Thin Films.
Nature Materials 2004, 3(8), 545-50C.
M. Stafford, C. Harrison, K. L. Beers, A. Karim, E. J. Amis, M. R. Vanlandigham, Ho-Cheol Kim, Willi Volksen, Robert D. Miller, Eva E. Simonyi,

Supercritical CO2 Extraction of Porogen Phase: An Alternative Route to Nanoporous Dielectrics.
Journal of Materials Research 2004, 19(11), 3224-33.
J. A. Lubguban, S. Gangopadhyay, B. Lahlouh, T. Rajagopalan, N. Biswas, J. Sun, D. H. Huang, S. L. Simon, A. Mallikarjunan, H.C. Kim, J. Hedstrom, W. Volksen, R. D. Miller, M. F. Toney.

Templating organosilicate vitrification using unimolecular self-organizing polymers prepared from teandem ring opening and atom transfer radical polymerizations.
Macromol. Symp. 2004, 215, 295-305.
T. Magbitang, V. Lee, E.F. Connor, L. Sundberg, H.C. Kim, W. Volksen, C.J. Hawker, R.D. Miller, J.L. Hedrick.

Nanoporous low-k dielectric constant organosilicate materials derived from inorganic polymer blends.
Polymers for Microelectronics and Nanoelectronics 2004, 874, 144-150.
R.D. Miller, W. olksen, V. Lee, E.F. Connor, R. Zafran, L. Sundberg, C.J. Hawker, J.L. Hedrick, E. Huang, M. Toney, Q.R. Huang, C.W. Frank, H.C. Kim.

Templating of silsesquioxane crossp-linking using unimolecular self-organizing polymers.
Angew. Chem., Int. Ed. 2003, 42, 3785-3788.
E.F. Connor, L.K. Sundberg, H.C. Kim, J.J. Cornelissen, T. Magbitang, P.M. Rice, V. Lee, C.J. Hawker, W. Volksen, J.L Hedrick, R.D. Miller.

Supercritical Carbon Dioxide Extraction of Porogens for the Preparation of Ultralow-Dielectric-Constant Films.
Applied Physics Letters 2003, 82(24), 4328-30.
T. Rajagopalan, B. Lahlouh, J. A. Lubguban, N. Biswas, S. Gangopadhyay, J. Sun, D. H. Huang, S. L. Simon, A. Mallikarjunan, H.C. Kim, W. Volksen, M.F. Toney, E. Huang, P.M. Rice, E.A. Delenia, R.D. Miller.

Miscibility in Organic/Inorganic Hybrid Nanocomposites Suitable for Microelectronic Applications: Comparison of Modulated Differential Scanning Calorimetry and Fluorescence Spectroscopy.
Macromolecules 2003, 36(20), 7661-71
R.D. Miller, J.L. Hedrick, E.Huang, W. Volksen, Q. Huang, C. Frank, D. Mecerreyes, H.C. Kim.

Application of complex macromolecular architectures for advanced microelectronic materials.
Chemistry - A European Journal 2002, 8, 3308-3319.
J.L. Hedrick, T. Magbitang, E.F. Connor, T. Glauser, W. Volksen, C.J. Hawker, V. Lee, R.D. Miller.

Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle x-ray scattering.
Appl. Phys. Lett. 2002, 81, 2232-2234.
E. Huang, M. Toney, W. Volksen, D. Mecerreyes, P. Brock, H.C. Kim, C.J. Hawker, J.L. Hedrick, V. Lee, T. Magbitang, R.D. Miller, L.B. Lurio.

Fabrication of multi-layered nanoporous poly(methyl silsesquioxane.
Adv. Mater. 2002, 14, 1637-1639.
H.C. Kim, J.B. Wilds, C.R. Kreller, W. Volksen, P. Brock, V. Lee, T. Magbitang, J.L. Hedrick, C.J. Hawker, R.D. Miller.

Structure and Interaction of Organic/Inorganic Hybrid Nanocomposites for Microelectronic Applications.
Chemistry of Materials 2002, 14(9), 3676-3685.
Q. R. Huang, Willi Volksen, Elbert Huang, Mike F. Toney, C. W. Frank, Robert D. Miller.

Porosity Effect on the Dielectric Constant and Thermomechanical Properties of Organosilicate Films.
Applied Physics Letters 2002, 81(22), 4180-2.
J. J. Liu, D. W. Gan, C. Hu, M. Kiene, P. S. Ho, W. Volksen, R. D. Miller.

Application of hyperbranched block copolymers as templates for the generation of nanoporous organosilicates.
High Perform. Polym. 2001, 13, S11-S19.
D. Mecerreyes, E. Huang, T. Magbitang, W.Volksen, C.J. Hawker, V. Lee, R.D. Miller, J.L. Hedrick.

A novel approach to functionalized nanoparticles: Self-crosslinking for macromolecules in ultra-dilute solution.
Adv. Mater. 2001, 13, 204-208.
D. Mecerreyes, V. Lee, C.J. Hawker, J.L. Hedrick, A. Wursch, W. Volksen, T. Magbitang, E. Huang, R.D. Miller.

Supramolecular approaches to nanoscale dielectric foams for advanced microelectronic devices.
MRS Bulletin 2000, 25, 54-58.
C.J. Hawker, J.L. Hedrick, R.D. Miller, W. Volksen.

Book Chapters

"Spin-On Dielectric Materials", Dielectric Films for Advanced Microelectronics, K .Maex, M. R. Baklanov, M. Green (Editors), John Wiley & Sons, 2007.
Geraud Dubois, Robert D. Miller, Willi Volksen.

"Microelectronic Materials with Hierarchical Organization", Macromolecular Engineering: From precise Macromolecular Synthesis to Macroscopic Materials Properties and Applications, Eds. K. Matyjaszewski, Y. Gnanou, L. Leibler, VCH, 2007.
G. Dubois, R.D. Miller, J.L. Hedrick

"Nanostructured Silica and Silica-Derived Materials", Dekker Encyclopedia of Nanoscience and Nanotechnology, 2005.
H.C. Kim, G. Dubois.

"Porous Organosilicates for On-Chip Applications: Dielectric Generational Extendibility by the Introduction of Porosity", Springer Series in Advanced Microelectronics, Vol. 9 :Low Dielectric Constant Materials for IC Applications, P. Ho, J. Leu, W.W. Lee (Editors), Springer Verlag, 2003.
W. Volksen, R. D. Miller, J. L. Hedrick, C. J. Hawker, V. Y. Lee, T. P. Magbitang, M. F. Toney, K. Lynn, M. Weber, M. Petkov, P. Ho, M. Kiene, J. Liu, K. P. Rodbell, E. Huang.

Issued Patents:

US 7,229,934 (06/12/2007)
Porous organosilicates with improved mechanical properties.
Dubois, Geraud Jean-Michel; Hedrick, James Lupton; Kim, Ho-Cheol; Lee, Victor Yee-Way; Magbitang, Teddie Peregrino; Miller, Robert Dennis; Simonyi, Eva E.; Volksen, Willi.

US 7,087,982 (08/08/2006)
Nitrogen-containing polymers as porogens in the preparation of highly porous, low dielectric constant materials.
Huang; Elbert Emin, Magbitang; Teddie, Miller, Robert Dennis; Volksen; Willi.

US 7,056,840 (06/06/2006)
Direct photo-patterning of nanoporous organosilicates, and method of use.
Miller, Robert Dennis; Kim, Ho-Cheol; Connor, Eric; Lee, Victor Yee-Way; Wallraff, Gregory Michael; Volksen, Willi.

US 6,992,115 (01/31/2006)
Preparation of crosslinked particles from polymers having activatible crosslinking groups.
Hawker, Craig Jon; Hedrick, James Lupton; Miller, Robert Dennis; Victor Yee-Way.

US 6,890,703 (05/10/2005)
Preparation of crosslinked particles from polymers having activatible crosslinking groups.
Hawker, Craig Jon; Hedrick, James Lupton; Miller, Robert Dennis; Victor Yee-Way.

US 6,812,551 (12/02/2004)
Defect-free dielectric coatings and preparation thereof using polymeric nitrogenous porogens.
Hawker, Craig Jon; Hedrick, James Lupton; Huang, Elbert Emin; Lee, Victor Yee-Way; Magbitang, Teddie; Mecerreyes, David; Miller, Robert Dennis; Volksen, Willi.

US 6,685,983 (02/03/2004)
Defect-free dielectric coatings and preparation thereof using polymeric nitrogenous porogens.
Hawker, Craig Jon; Hedrick, James Lupton; Huang, Elbert Emin; Lee, Victor Yee-Way; Magbitang, Teddie; Mecerreyes, David; Miller, Robert Dennis; Volksen, Willi.

US 6,670,285 (12/30/2003)
Nitrogen-containing polymers as porogens in the preparation of highly porous, low dielectric constant materials.
Hawker, Craig Jon; Hedrick, James Lupton; Huang, Elbert Emin; Lee, Victor Yee-Way; Magbitang, Teddie; Miller, Robert Dennis; Volksen, Willi.

US 6,541,865 (04/01/2003)
Porous dielectric material and electronic devices fabricated therewith.
Hawker, Craig Jon; Hedrick, James L.; Miller, Robert D.; Volksen, Willi.

US 6,399,666 (06/04/2002)
Insulative matrix material.
Hawker, Craig Jon; Hedrick, James Lupton; Heise, Andreas; Mecerreyes, David; Miller, Robert Dennis; Trolls.ang.s, Olof Mikael.

US 6,342,454 (01/29/2002)
Electronic devices with dielectric compositions and method for their manufacture.
Hawker, Craig Jon; Hedrick, James L.; Miller, Robert D.; Volksen, Willi.

US 6,333,141 (12/25/2001)
Process for manufacture of integrated circuit device using inorganic/organic matrix comprising polymers of three dimensional architecture .
Carter, Kenneth Raymond Dipietro, Richard Anthony; Hawker, Craig Jon; Hedrick, James Lupton; Lee, Victor YeeWay; Miller, Robert Dennis; Volksen, Willi; Yoon, Do Yeung.

US 6265753 (07/24/2001)
Interconnect dielectric compositions, preparation thereof, and integrated circuit devices and packages fabricated with.
Carter, Kenneth R.; Hedrick, James Lupton; Lee, Victor Yee-Way; McHerron, Dale C.; Miller, Robert Dennis.

US 6,177,360 (01/23/2001)
Process for manufacture of integrated circuit device.
Carter, Kenneth Raymond; Cook, Robert Frances; Harbison, Martha Alyne; Hawker, Craig Jon; Hedrick, James Lupton; Lee, Victor Yee-Way; Liniger, Eric Gerhard; Miller, Robert Dennis; Volksen, Willi; Yoon, Do Yeung.

US 6,143,643 (11/07/2000)
Process for manufacture of integrated circuit device using organosilicate insulative matrices .
Carter, Kenneth Raymond; Hawker, Craig Jon; Hedrick, James Lupton; Lee, Victor YeeWay; Miller, Robert Dennis; Volksen, Willi; Yoon, Do Yeung.

US 6,110,649 (08/29/2000)
Process for manufacture of integrated circuit device.
Carter, Kenneth Raymond; Hawker, Craig Jon; Hedrick, James Lupton; Miller, Robert Dennis; Pogge, Bernhard.

US 6,107,357 (08/22/2000)
Dielectric compositions and method for their manufacture.
Hawker, Craig Jon; Hedrick, James L.; Miller, Robert D.; Volksen, Willi.

US 6,093,636 (07/25/2000)
Process for manufacture of integrated circuit device using a matrix comprising porous high temperature thermosets .
Carter, Kenneth Raymond; Dawson, Daniel Joseph; Hawker, Craig Jon; Hedrick, James Lupton; Hedrick, Jeffrey Curtis; Lee, Victor YeeWay; Miller, Robert Dennis; Volksen, Willi; Yoon, Do Yeung.

US 5,962,113 (10/05/1999)
Integrated circuit device and process for its manufacture.
Brown, Hugh Ralph; Carter, Kenneth Raymond; Cha, Hyuk-Jin; Dipietro, Richard Anthony; Hedrick, James Lupton; Hummel, John Patrick; Miller, Robert Dennis; Yoon, Do Yeung

US 5,953,627 (09/14/1999)
Process for manufacture of integrated circuit device.
Carter, Kenneth Raymond; Cook, Robert Francis; Harbison, Martha Alyne; Hawker; Craig Jon; Hedrick, James Lupton; Kim, Sung-Mog; Liniger, Eric Gerhard; Miller, Robert Dennis; Volksen, Willi; Yoon, Do Yeung.

US 5,895,263 (04/20/1999)
Process for manufacture of integrated circuit device.
Carter, Kenneth Raymond; Dawson, Daniel Joseph; DiPietro, Richard Anthony; Hawker, Craig Jon; Hedrick, James Lupton; Miller, Robert Dennis; Yoon, Do Yeung.

US 5,883,219 (03/16/1999)
Integrated circuit device and process for its manufacture.
Carter, Kenneth Raymond; Dawson, Daniel Joseph; DiPietro, Richard Anthony; Hawker, Craig Jon; Hedrick, James Lupton; Miller, Robert Dennis; Yoon, Do Yeung.

US 5,804,607 (09/08/1998).
Preparation of foamed elastomeric polymer used as dielectrics in electronic components.
Hedrick, Jeffrey curtis; Hedrick, James Lupton; Hilborn, Jons Gunnar; Lio, Yun-hsin; Miller, Robert Dennis; Shih, Da-yuan.

US 5,773,197 (06/30/1998)
Integrated circuit device and process for its manufacture.
Carter, Kenneth Raymond; Hedrick, James Lupton; Miller, Robert Dennis.

US 5,767,014 (06/16/1998)
Integrated circuit and process for its manufacture.
Hawker, Craig Jon; Hedrick, James Lupton; Miller; Robert Dennis.