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POROUS THIN FILMS
MECHANICAL PROPERTIES
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Models inspired from cellular foams predict a
power law decay of the elastic and fracture properties as a function of density.
Such prediction is verified experimentally by measuring the Young's modulus as a
function of density for different MSSQ resins.
References:
A. Jain et al. Thin Solid films 2001, 398-399, 513.
N. Tajima, Appl. Phys. Lett. 2006, 89, 061907/1.
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Mechanically Robust Organosilicates
Porous Materials: Concept → Integration
Vapor Phase Surface Modification/Functionalization
- ILD repair
- Surface functionalization
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