Personnel:
Geraud Dubois - Manager Hybrid Polymeric Materials Group
Willi Volksen - Research Staff Member, project leader for development of ULK k < 2.4
Teddie Magbitang - Hardware Engineer, materials characterization and processing
Theo J Frot - Post-doc, new pore protection concepts
Collaborations:
Stanford University - Prof. Reinhold Dauskardt - Fracture Mechanics
Rensselaer Polytechnic Institute - Prof. Leonard Interrante - Novel low-oxygen content ILD candidate materials
Laboratoire des Technologies de la Microelectronique - Maxime Darnon - Etch and plasma damage of ULK materials
