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Dielectric Materials Research for Advanced Microelectronic Devices

Personnel:

Geraud Dubois - Manager Hybrid Polymeric Materials Group

Willi Volksen - Research Staff Member, project leader for development of ULK k < 2.4

Teddie Magbitang - Hardware Engineer, materials characterization and processing

Theo J Frot - Post-doc, new pore protection concepts

Collaborations:

Stanford University - Prof. Reinhold Dauskardt - Fracture Mechanics

Rensselaer Polytechnic Institute - Prof. Leonard Interrante - Novel low-oxygen content ILD candidate materials

Laboratoire des Technologies de la Microelectronique - Maxime Darnon - Etch and plasma damage of ULK materials