Nature has evolved many methods for self-assemblying both organic and inorganic-organic composite functional nanostructures. While much remains to be understood about the biological mechanisms, one way that silicate structures form in biological systems is through the use of specifically tailored enzymes. We are mimicking some of these processes to mineralize block copolymer thin film templates with SiOx to produce high density two-dimensional arrays of silica nanoparticles. These are robust etch masks for transferring patterns into underlying substrates, for instance, phase change memory materials.