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Materials for UV Nanoimprint Lithography

Material criteria for nanoimprint lithography

As illustrated above there are a number of considerations. The initial resist liquid must have a low viscosity to enable the template crevices to fill rapidly, and must have low volatility so that the resist composition does not change after dispense. The composition of the curable material is of critical importance: its components affect the degree of cure, adhesion to the template surface, adhesion to the bottom surface, cohesive strength of the cured material, and the dimensional stability of the imprinted features. These factors play a direct role in controlling defect formation. In order to develop a systematic understanding of the relationship between resist chemistry and curing and adhesive characteristics we are investigating a broad array of acrylate, vinyl ether and methacrylate imprint systems. Recent work has focused on the relationship between Tg of r esist components and the final properties of cured material (F. A. Houle et al, SPIE Proceedings Vol. 6519, 2007), and on formulation and curing behaviors of vinyl ethers (H. Ito et al, SPIE Proceedings Vol. 6153, 61531A, 2006).






  

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