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Forward Recoil Spectrometry (FRS)
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Energy spectrometry of 1H or 2H recoiling from MeV He+ ion collisions with the analytical sample. This method provides depth profile information for hydrogen and deuterium, which are invisible to RBS.
FRS has the following characteristics:
- Hydrogen, deuterium determination (specific)
- High sensitivity (typ. 1014/cm2 or 0.1 at.% H in bulk)
- Depth of profiles; resolution typ. 300Å
- Depth range typ. 0-1 micron
- Non-destructive (radiation damage to polymers controllable)
- Matrix independent (no sensitivity to chemical bonding)
- Depth range typ. 0 - 1mm
- Depth resolution ~20Å typ. near surface
- Spatial information:
- - beam spot size 0.5-2.0 mm
- - map or raster option to 7cm x 7cm
Typical Applications
- Hydrogen or deuterium concentration profiles
- H concentration in diamond-like carbon coatings
- Polymer film interface diffusion (using a deuterium marker)
- OH surface contamination
Typical example of FRS/RBS analysis: The black line shows the RBS spectrum of a typical magnetic recording disk, with the Co, Pt and Cr signals from the magnetic layer indicated. On top of the magnetic layer is a protection layer consisting of C, N and H. The C and N signals are indicated. The blue inset spectrum shows the FRS data. The single peak is due to H in the carbon overcoat. The ratio of the C, N and H peak areas provides the film concentration, and the sum of the peak areas is the film thickness.
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