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Specular X-ray reflectivity (SXR) is a well-established, powerful tool for measuring thickness, density and interfacial thickness of thin films on substrates. Our high resolution instrument contains finely focused Cu Ka radiation with a wavelength of 1.54Å (maximum settings for ceramic x-ray tube: 60kV, 60mA), four-bounced Ge (220) crystal monochromator, three-bounced Ge channel cut crystal, and Goniometer of reproducibility ±0.0001 degrees. It also has a high temperature sample stage (Anton Paar, DHS 900) which can heat samples up to 900ºC under inert gas environments. Figure 1 shows a typical SXR profile which provides density, thickness and roughness data of thin films.
A typical SXR profile with indications of the critical angle, the second critical angle, slope and periodicity of fringes, which correspond to the density of thin film and substrate, surface roughness, and thickness, respectively.
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